Electronic scheme for full control of organic piezoelectric MEMS resonatorss - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2016

Electronic scheme for full control of organic piezoelectric MEMS resonatorss

Fabrice Mathieu
Liviu Nicu

Résumé

This work deals with an acquiring system dedicated to the measurement of the resonance frequency and the quality factor of organic piezoelectric resonators. These resonators consist of a free-standing cantilever and its non-released counterpart used to compensate electrical signals that are not due to mechanical behavior. The system uses a capacitive half-bridge with two AC voltages in opposite phases, associated with an IQ demodulator. The magnitudes of the two AC voltages can be set independently from one another, which enables a powerful compensation of parasitic capacitance. Thanks to this dedicated system, measurements of the resonance frequency of organic piezoelectric resonators both in air and liquid media have been performed. Several methods to determine accurately the resonance frequency have been tested and compared in terms of measurement noise.
Fichier principal
Vignette du fichier
Abstract_IEEE_Freq_Contr_v_finale.pdf (195.03 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-01271757 , version 1 (30-08-2016)

Identifiants

Citer

Pierre-Henri Ducrot, Isabelle Dufour, Cédric Ayela, Fabrice Mathieu, Liviu Nicu. Electronic scheme for full control of organic piezoelectric MEMS resonatorss. 2016 IEEE International Frequency Control Symposium (IFCS 2016), May 2016, La Nouvelle Orléans, LA, United States. ⟨10.1109/FCS.2016.7546797⟩. ⟨hal-01271757⟩
243 Consultations
138 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More