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Article Dans Une Revue Physica E: Low-dimensional Systems and Nanostructures Année : 2002

Structure and ordering of GaN quantum dot multilayer investigated by X-ray grazing incidence techniques

T. H. Metzger
  • Fonction : Auteur
C. Ferrero
  • Fonction : Auteur
E. Bellet-Amalric
B. Daudin
  • Fonction : Auteur
H. Mariette
G. Mula
  • Fonction : Auteur

Résumé

The growth of GaN quantum dot multilayers embedded in an AlN matrix can be controlled using the Stranski–Krastanov mode. For samples grown in the wurtzite structure, we present a non-destructive statistical investigation of the quantum dot shape, size and correlation, in both lateral and vertical directions using grazing incidence small angle X-ray scattering. In surface plane, the adjustment of the measurement leads to values for the size and the inter-dot distance that are consistent with direct characterization. In the vertical direction, the correlation length is quantified and shows the perfect vertical alignment of the dots.

Dates et versions

hal-01256915 , version 1 (15-01-2016)

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Citer

Virginie Chamard, T. H. Metzger, C. Ferrero, E. Bellet-Amalric, B. Daudin, et al.. Structure and ordering of GaN quantum dot multilayer investigated by X-ray grazing incidence techniques. Physica E: Low-dimensional Systems and Nanostructures, 2002, 13 (2-4), pp.1115-1118. ⟨10.1016/S1386-9477(02)00316-8⟩. ⟨hal-01256915⟩
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