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Communication Dans Un Congrès Année : 2015

Robust control strategies of stick-slip type actuators for fast and accurate nanopositioning operations in scanning mode

Résumé

This paper deals with robust closed-loop control of a nano-robotic system dedicated to fast scanning probe microscopy. The nano-robotic system is actuated by piezoelectric stick-slip actuators able to produce a millimeter range displacement with a nanometer resolution. In order to meet the requirements of fast scanning in terms of closed-loop bandwidth and vibration damping, robust control strategies are studied. We first show that a commonly used one degree of freedom (1-DOF) H∞ controller is limited to satisfy robust performances required for fast and accurate positioning of the actuators. As such, the control strategy is defined considering two closed-loops. Results show that the 2-DOF H∞ control scheme allows robust performances for the positioning of nanorobotic systems and lead to new perspectives for fast scanning probe microscopy using stick-slip actuators.
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Dates et versions

hal-01246552 , version 1 (18-12-2015)

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Citer

Raouia Oubellil, Alina Voda, Mokrane Boudaoud, Stéphane Régnier. Robust control strategies of stick-slip type actuators for fast and accurate nanopositioning operations in scanning mode. MED 2015 - 23rd Mediterranean Conference on Control and Automation, Jun 2015, Torremolinos, Spain. pp.650-655, ⟨10.1109/MED.2015.7158820⟩. ⟨hal-01246552⟩
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