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Article Dans Une Revue Journal of Applied Physics Année : 2015

Quantitative analysis of doped/undoped ZnO nanomaterials using laser assisted atom probe tomography: Influence of the analysis parameters

Rodrigue Lardé
Etienne Talbot
Philippe Pareige
Lorenzo Rigutti
Jonathan Houard
Celia Castro
Vincent Sallet
Emir Zehani
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  • IdRef : 189833602

Résumé

In the last decade, atom probe tomography has become a powerful tool to investigate semiconductor and insulator nanomaterials in microelectronics, spintronics, and optoelectronics. In this paper, we report an investigation of zinc oxide nanostructures using atom probe tomography. We observed that the chemical composition of zinc oxide is strongly dependent on the analysis parameters used for atom probe experiments. It was observed that at high laser pulse energies, the electric field at the specimen surface is strongly dependent on the crystallographic directions. This dependence leads to an inhomogeneous field evaporation of the surface atoms, resulting in unreliable measurements. We show that the laser pulse energy has to be well tuned to obtain reliable quantitative chemical composition measurements of undoped and doped ZnO nanomaterials.
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Dates et versions

hal-01241229 , version 1 (27-06-2018)

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Citer

Nooshin Amirifar, Rodrigue Lardé, Etienne Talbot, Philippe Pareige, Lorenzo Rigutti, et al.. Quantitative analysis of doped/undoped ZnO nanomaterials using laser assisted atom probe tomography: Influence of the analysis parameters. Journal of Applied Physics, 2015, 118 (21), pp.215703. ⟨10.1063/1.4936167⟩. ⟨hal-01241229⟩
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