Overcoming limitations of nanomechanical resonators with simultaneous resonances
Résumé
Dynamic stabilization by simultaneous primary and superharmonic resonances for high order nonlin-earity cancellation is demonstrated with an electrostatically-actuated, piezoresistively-transduced nanome-chanical resonator. We prove experimentally how the combination of both the third-order nonlinearity cancellation and simultaneous resonances can be used to linearly drive a nanocantilever up to very large amplitudes compared to fundamental limits like pull-in occurrence, opening the way towards resonators with high frequency stability for high-performance sensing or time reference.
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