Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT) - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2015

Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)

Résumé

In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) lithography with other standard planar processing technologies allows us to achieve high-throughput manufacturing. Multilayer stack cantilevers with different geometries have been implemented with measured fundamental resonant frequencies in the megahertz range and Q-factor values ranging from ~130 in air up to ~900 in a vacuum at room temperature. A refined finite element model taking into account the exact configuration of the piezoelectric stack is proposed and demonstrates the importance of considering the dependence of the beam’s cross-section upon the axial coordinate. We extensively investigate both experimentally and theoretically the transduction efficiency of the implemented piezoelectric layer and report for the first time at this integration level a piezoelectric constant of d31 = 15 fm.V−1. Finally, we discuss the current limitations to achieve piezoelectric detection.
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Dates et versions

hal-01169283 , version 1 (29-06-2015)

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Denis Dezest, Olivier Thomas, Fabrice Mathieu, Laurent Mazenq, Caroline Soyer, et al.. Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT). Journal of Micromechanics and Microengineering, 2015, 25 (3), pp.35002-35013. ⟨10.1088/0960-1317/25/3/035002⟩. ⟨hal-01169283⟩
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