Journal Articles Applied Physics Letters Year : 2015

Shape transition in nano-pits after solid-phase etching of SiO2 by Si islands

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hal-01151207 , version 1 (04-02-2021)

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F. Leroy, Y. Saito, S. Curiotto, F. Cheynis, Olivier Pierre-Louis, et al.. Shape transition in nano-pits after solid-phase etching of SiO2 by Si islands. Applied Physics Letters, 2015, 106, pp.191601. ⟨10.1063/1.4921091⟩. ⟨hal-01151207⟩
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