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Article Dans Une Revue Nanoscale Research Letters Année : 2013

Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide

Résumé

Silicon nanocrystals embedded in a silicon oxide matrix were deposited by radio frequency reactive magnetron sputtering. By means of Raman spectroscopy, we have found that a compressive stress is exerted on the silicon nanocrystal cores. The stress varies as a function of silicon concentration in the silicon-rich silicon oxide layers varies, which can be attributed to changes of nanocrystal environment. By conducting the Fourier transform infrared absorption experiments, we have correlated the stresses exerted on the nanocrystal core to the degree of matrix structural order.
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Dates et versions

hal-01138077 , version 1 (02-04-2015)

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Grzegorz Zatryb, Artur Podhorodecki, Jan Misiewicz, Julien Cardin, Fabrice Gourbilleau. Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide. Nanoscale Research Letters, 2013, 8 (1), pp.1-7. ⟨10.1016/j.solidstatesciences.2009.05.004⟩. ⟨hal-01138077⟩
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