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Conference Papers Year : 2015

Parameter-tolerant design of high contrast gratings


This work is devoted to the design of high contrast grating mirrors taking into account the technological constraints and tolerance of fabrication. First, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors. Then, the tolerances of the grating dimensions have been precisely studied to develop a robust optimization algorithm with which high contrast gratings, exhibiting not only a high efficiency but also large tolerance values, could be designed. Finally, several structures integrating previously designed HCGs has been simulated to validate and illustrate the interest of such gratings.
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hal-01132683 , version 1 (16-04-2020)



Christyves Chevallier, Nicolas Fressengeas, Joel Jacquet, Guilhem Almuneau, Youness Laaroussi, et al.. Parameter-tolerant design of high contrast gratings. Photonics West, SPIE, Feb 2015, San Francisco, United States. pp.93720N-93720N-8, ⟨10.1117/12.2081595⟩. ⟨hal-01132683⟩
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