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Communication Dans Un Congrès Année : 2014

Methodology Based on Experiments and 3-D EM Simulations for Frequency Characterization of Buried Capacitors

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hal-01109473 , version 1 (26-01-2015)

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  • HAL Id : hal-01109473 , version 1

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Massar Wade, Isabelle Bord-Majek, Tristan Dubois, Genevieve Duchamp. Methodology Based on Experiments and 3-D EM Simulations for Frequency Characterization of Buried Capacitors. ESTC 2014, Sep 2014, Helsinki, Finland. ⟨hal-01109473⟩
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