<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-01105261</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-19T16:53:18+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Noise optimisation of a piezoresistive CMOS MEMS for magnetic field sensing</title>
            <author role="aut">
              <persName>
                <forename type="first">Vincent</forename>
                <surname>Beroulle</surname>
              </persName>
              <email type="md5">c81294c2af1b1a2ef1c14f12e742ba67</email>
              <email type="domain">lcis.grenoble-inp.fr</email>
              <idno type="idhal" notation="string">vincent-beroulle</idno>
              <idno type="idhal" notation="numeric">2213</idno>
              <idno type="halauthorid" notation="string">10809-2213</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-0617-3087</idno>
              <idno type="IDREF">https://www.idref.fr/07094122X</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/122344</idno>
              <affiliation ref="#struct-25697"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Yves</forename>
                <surname>Bertrand</surname>
              </persName>
              <email type="md5">7ee40cf0a559a917ddc8d9917b013087</email>
              <email type="domain">lirmm.fr</email>
              <idno type="idhal" notation="numeric">938340</idno>
              <idno type="halauthorid" notation="string">2525267-938340</idno>
              <affiliation ref="#struct-408080"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Laurent</forename>
                <surname>Latorre</surname>
              </persName>
              <email type="md5">08427e18f58d4ed9c65f23ab7f938b99</email>
              <email type="domain">lirmm.fr</email>
              <idno type="idhal" notation="string">laurent-latorre</idno>
              <idno type="idhal" notation="numeric">8585</idno>
              <idno type="halauthorid" notation="string">17601-8585</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-0478-1572</idno>
              <idno type="IDREF">https://www.idref.fr/160859581</idno>
              <affiliation ref="#struct-408080"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Pascal</forename>
                <surname>Nouet</surname>
              </persName>
              <email type="md5">c95e5b78f0a7b66fc9e249fd1cbf864e</email>
              <email type="domain">lirmm.fr</email>
              <idno type="idhal" notation="string">pascal-nouet</idno>
              <idno type="idhal" notation="numeric">6242</idno>
              <idno type="halauthorid" notation="string">17602-6242</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-2137-2623</idno>
              <idno type="IDREF">https://www.idref.fr/079135196</idno>
              <affiliation ref="#struct-408080"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Vincent</forename>
                <surname>Beroulle</surname>
              </persName>
              <email type="md5">c81294c2af1b1a2ef1c14f12e742ba67</email>
              <email type="domain">lcis.grenoble-inp.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2022-09-09 15:55:27</date>
              <date type="whenWritten">2002</date>
              <date type="whenModified">2025-09-27 19:49:14</date>
              <date type="whenReleased">2022-09-19 15:13:11</date>
              <date type="whenProduced">2002</date>
              <date type="whenEndEmbargoed">2022-09-09</date>
              <ref type="file" target="https://hal.science/hal-01105261v1/document">
                <date notBefore="2022-09-09"/>
              </ref>
              <ref type="file" subtype="author" n="1" target="https://hal.science/hal-01105261v1/file/Noise.pdf" id="file-3773964-3300480">
                <date notBefore="2022-09-09"/>
              </ref>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="122344">
                <persName>
                  <forename>Vincent</forename>
                  <surname>Beroulle</surname>
                </persName>
                <email type="md5">c81294c2af1b1a2ef1c14f12e742ba67</email>
                <email type="domain">lcis.grenoble-inp.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-01105261</idno>
            <idno type="halUri">https://hal.science/hal-01105261</idno>
            <idno type="halBibtex">beroulle:hal-01105261</idno>
            <idno type="halRefHtml">&lt;i&gt;SOC Design Methodologies&lt;/i&gt;, 90, Kluwer Academic Publishers, pp.461-472, 2002, IFIP — The International Federation for Information Processing, 978-1-4757-6530-4. &lt;a target="_blank" href="https://dx.doi.org/10.1007/978-0-387-35597-9_39"&gt;&amp;#x27E8;10.1007/978-0-387-35597-9_39&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">SOC Design Methodologies, 90, Kluwer Academic Publishers, pp.461-472, 2002, IFIP — The International Federation for Information Processing, 978-1-4757-6530-4. &amp;#x27E8;10.1007/978-0-387-35597-9_39&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-3773964-3300480"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UGA">HAL Grenoble Alpes</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-PMF_GRENOBLE">Université Pierre-Mendès-France - Grenoble II</idno>
            <idno type="stamp" n="INPG">Institut polytechnique de Grenoble</idno>
            <idno type="stamp" n="SYSMIC" corresp="LIRMM">SysMic</idno>
            <idno type="stamp" n="LCIS">Laboratoire de Conception et d'Intégration des Systèmes</idno>
            <idno type="stamp" n="LIRMM">Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier</idno>
            <idno type="stamp" n="LIRMM_MIC">MIC</idno>
            <idno type="stamp" n="MIC">Département Microélectronique</idno>
            <idno type="stamp" n="MIPS">Mathématiques, Informatique, Physique et Systèmes</idno>
            <idno type="stamp" n="UNIV-MONTPELLIER">Université de Montpellier</idno>
            <idno type="stamp" n="UM-2015-2021" corresp="UNIV-MONTPELLIER">Université de Montpellier (2015-2021)</idno>
            <idno type="stamp" n="TEST-UGA">TEST-UGA</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Noise optimisation of a piezoresistive CMOS MEMS for magnetic field sensing</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Vincent</forename>
                    <surname>Beroulle</surname>
                  </persName>
                  <email type="md5">c81294c2af1b1a2ef1c14f12e742ba67</email>
                  <email type="domain">lcis.grenoble-inp.fr</email>
                  <idno type="idhal" notation="string">vincent-beroulle</idno>
                  <idno type="idhal" notation="numeric">2213</idno>
                  <idno type="halauthorid" notation="string">10809-2213</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-0617-3087</idno>
                  <idno type="IDREF">https://www.idref.fr/07094122X</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/122344</idno>
                  <affiliation ref="#struct-25697"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Yves</forename>
                    <surname>Bertrand</surname>
                  </persName>
                  <email type="md5">7ee40cf0a559a917ddc8d9917b013087</email>
                  <email type="domain">lirmm.fr</email>
                  <idno type="idhal" notation="numeric">938340</idno>
                  <idno type="halauthorid" notation="string">2525267-938340</idno>
                  <affiliation ref="#struct-408080"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Laurent</forename>
                    <surname>Latorre</surname>
                  </persName>
                  <email type="md5">08427e18f58d4ed9c65f23ab7f938b99</email>
                  <email type="domain">lirmm.fr</email>
                  <idno type="idhal" notation="string">laurent-latorre</idno>
                  <idno type="idhal" notation="numeric">8585</idno>
                  <idno type="halauthorid" notation="string">17601-8585</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-0478-1572</idno>
                  <idno type="IDREF">https://www.idref.fr/160859581</idno>
                  <affiliation ref="#struct-408080"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Pascal</forename>
                    <surname>Nouet</surname>
                  </persName>
                  <email type="md5">c95e5b78f0a7b66fc9e249fd1cbf864e</email>
                  <email type="domain">lirmm.fr</email>
                  <idno type="idhal" notation="string">pascal-nouet</idno>
                  <idno type="idhal" notation="numeric">6242</idno>
                  <idno type="halauthorid" notation="string">17602-6242</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-2137-2623</idno>
                  <idno type="IDREF">https://www.idref.fr/079135196</idno>
                  <affiliation ref="#struct-408080"/>
                </author>
              </analytic>
              <monogr>
                <idno type="isbn">978-1-4757-6530-4</idno>
                <title level="m">SOC Design Methodologies</title>
                <imprint>
                  <publisher>Kluwer Academic Publishers</publisher>
                  <biblScope unit="serie">IFIP — The International Federation for Information Processing</biblScope>
                  <biblScope unit="volume">90</biblScope>
                  <biblScope unit="pp">461-472</biblScope>
                  <date type="datePub">2002</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1007/978-0-387-35597-9_39</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">noise</term>
                <term xml:lang="en">magnetic sensor</term>
                <term xml:lang="en">CMOS MEMS</term>
              </keywords>
              <classCode scheme="halDomain" n="spi.nano">Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics</classCode>
              <classCode scheme="halTypology" n="COUV">Book sections</classCode>
              <classCode scheme="halOldTypology" n="COUV">Book sections</classCode>
              <classCode scheme="halTreeTypology" n="COUV">Book sections</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Using 100% industrial fabrication processes, the design and the fabrication of a monolithic CMOS MEMS magnetic field sensor, targeting noise reduction, are developed in this paper. The sensor is based on a resonant cantilever structure with optimized electronics for signal treatment and noise filtering in order to achieve competitive performances. With a final sensitivity of 350Vrms/T and a 2μT resolution, the system is able to measure earth natural magnetic field.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-25697" status="OLD">
          <orgName>Laboratoire de Conception et d'Intégration des Systèmes</orgName>
          <orgName type="acronym">LCIS</orgName>
          <date type="start">1996-01-01</date>
          <date type="end">2015-12-31</date>
          <desc>
            <address>
              <addrLine>50, rue Barthélémy de Laffemas – BP54 26902 Valence Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://lcis.inpg.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-3886" type="direct"/>
            <relation active="#struct-300275" type="direct"/>
          </listRelation>
        </org>
        <org type="researchteam" xml:id="struct-408080" status="OLD">
          <orgName>Conception et Test de Systèmes MICroélectroniques</orgName>
          <orgName type="acronym">SysMIC</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.lirmm.fr/recherche/equipes/sysmic</ref>
          </desc>
          <listRelation>
            <relation active="#struct-181" type="direct"/>
            <relation name="UMR5506" active="#struct-410122" type="indirect"/>
            <relation name="UMR5506" active="#struct-441569" type="indirect"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-3886" status="OLD">
          <idno type="IdRef">02640432X</idno>
          <idno type="ROR">https://ror.org/02f7wz369</idno>
          <orgName>Université Pierre Mendès France - Grenoble 2</orgName>
          <orgName type="acronym">UPMF</orgName>
          <date type="end">2015-12-31</date>
          <desc>
            <address>
              <addrLine>BP 47 - 38040 Grenoble Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.upmf-grenoble.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300275" status="OLD">
          <idno type="IdRef">026388804</idno>
          <orgName>Institut National Polytechnique de Grenoble</orgName>
          <orgName type="acronym">INPG</orgName>
          <date type="end">2006-12-31</date>
          <desc>
            <address>
              <addrLine>46 avenue Félix Viallet 38031 Grenoble Cedex 1</addrLine>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-181" status="OLD">
          <idno type="IdRef">139590827</idno>
          <idno type="ISNI">0000000405990488</idno>
          <idno type="RNSR">199111950H</idno>
          <idno type="ROR">https://ror.org/013yean28</idno>
          <orgName>Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier</orgName>
          <orgName type="acronym">LIRMM</orgName>
          <date type="start">1995-01-01</date>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>161 rue Ada - 34095 Montpellier</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.lirmm.fr</ref>
          </desc>
          <listRelation>
            <relation name="UMR5506" active="#struct-410122" type="direct"/>
            <relation name="UMR5506" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-410122" status="OLD">
          <idno type="ISNI">0000000120970141</idno>
          <idno type="ROR">https://ror.org/051escj72</idno>
          <orgName>Université de Montpellier</orgName>
          <orgName type="acronym">UM</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>163 rue Auguste Broussonnet - 34090 Montpellier</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.umontpellier.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>