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Article Dans Une Revue Japanese Journal of Applied Physics Année : 2014

Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs

Résumé

We present experimental data on the reliability of SU-8 polymer when used as a core material for the integration of microlenses on vertical-cavity surface-emitting lasers (VCSELs). The respective effects of a hot and humid environment on structural, mechanical and optical properties of this epoxy resist are investigated. High aspect-ratio SU-8 micropillars are found to keep a good surface morphology and a stable optical transmission, as well as a good adherence on the wafer. Thermal cycling is also studied to check material stability under electro-thermal actuation in SU-8 micro-opto-electro-mechanical system (MOEMS). These results are of great importance for the collective integration of low-cost SU-8-based passive or active microlens arrays onto VCSELs wafers for optical interconnects and optical sensing applications.
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Dates et versions

hal-01103136 , version 1 (14-01-2015)

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Benjamin Reig, Véronique Bardinal, Jean-Baptiste Doucet, Emmanuelle Daran, Thierry Camps, et al.. Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs. Japanese Journal of Applied Physics, 2014, vol. 53 (n° 8S2), pp.08MC03-1-08MC03-5. ⟨10.7567/JJAP.53.08MC03⟩. ⟨hal-01103136⟩
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