Growth of (Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structure - Archive ouverte HAL Access content directly
Journal Articles Journal of Crystal Growth Year : 2015

Growth of (Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structure

Fichier principal
Vignette du fichier
Growth of (sr,la)-(ta,ti)-O-N perovskite oxide.pdf (484.88 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

hal-01102057 , version 1 (22-10-2015)

Identifiers

Cite

Claire Le Paven, Laurent Le Gendre, Ratiba Benzerga, François Cheviré, Franck Tessier, et al.. Growth of (Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structure. Journal of Crystal Growth, 2015, 413, pp.5-11. ⟨10.1016/j.jcrysgro.2014.12.001⟩. ⟨hal-01102057⟩
203 View
271 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More