Shielded Coplanar Striplines for RF Integrated Applications
Résumé
In this article, shielded coplanar striplines (S‐CPS) are studied to achieve slow‐wave transmission lines in a CMOS process. The slow‐wave propagation is achieved by placing floating strips below the CPS transmission line. The propagation parameters of such transmission lines are derived by simulations by means of a “full wave” 3D EM software. Quality factors as high as 35 at 10 GHz together with effective dielectric constants of 78 are reported. If these simulation results are confirmed by measurements, this would open the door to the possible realization of integrated transmission line‐based RF circuits such as power dividers, phase‐shifters, or filters of medium bandwidth below 10 GHz.