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Article Dans Une Revue Journal of Microelectromechanical Systems Année : 2015

Lateral-mode vibration of microcantilever-based sensors in viscous fluids using Timoshenko beam theory

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hal-01059846 , version 1 (02-09-2014)

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Joshua Schultz, Stephen Heinrich, Fabien Josse, Isabelle Dufour, Nicholas Nigro, et al.. Lateral-mode vibration of microcantilever-based sensors in viscous fluids using Timoshenko beam theory. Journal of Microelectromechanical Systems, 2015, 24 (4), pp.848-860. ⟨10.1109/JMEMS.2014.2354596⟩. ⟨hal-01059846⟩
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