Technological improvements of a metal oxide gas multi-sensor based on a micro-hotplate structure and inkjet deposition for an automotive air quality sensor application - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2014

Technological improvements of a metal oxide gas multi-sensor based on a micro-hotplate structure and inkjet deposition for an automotive air quality sensor application

Résumé

In this paper we present a gas multi-sensor composed by an optimized low consumption (55mW-500°C) and low cost (microelectronics process) micro-hotplate and by three different metal oxides (CuO, ZnO and SnO2) sensing materials deposited by inkjet directly on the membrane. The realized structures have shown a stable and reproducible behavior. By using a specific temperature-modulated profile associated to a multivariate classifier, we have realized an electronic nose able to detect selectively four gases (alone and mixed) at low concentrations (CO-100ppm, NO2-0.2ppm, NH3-5ppm and C2H4O-2ppm).

Domaines

Electronique
Fichier principal
Vignette du fichier
MME2014_vf.pdf (734.76 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-01058911 , version 1 (28-08-2014)

Identifiants

  • HAL Id : hal-01058911 , version 1

Citer

Nicolas Dufour, Audrey Chapelle, Fabien Mesnilgrente, Véronique Conédéra, Philippe Menini. Technological improvements of a metal oxide gas multi-sensor based on a micro-hotplate structure and inkjet deposition for an automotive air quality sensor application. 25th Micromechanics and Microsystems Europe workshop (MME 2014), Aug 2014, Istanbul, Turkey. 4p. ⟨hal-01058911⟩
227 Consultations
283 Téléchargements

Partager

Gmail Facebook X LinkedIn More