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Article Dans Une Revue Microelectronics Journal Année : 2014

Fabrication and characterization of a planar interleaved micro-transformer with magnetic core

Résumé

This paper presents the design, the fabrication and the characterization of a planar interleaved micro-transformer with an Yttrium Iron Garnet (YIG) core. The design of this micro-transformer and the manufacturing steps are presented. HFSS software is used for the conception and the simulation of the interleaved magnetic micro-transformer. It is composed of two identical windings. A bottom magnetic core is used to improve the integrated transformer performances. To form the windings, we have used a surface micromachining process. We have also used a negative photoresist (SU-8) as an insulating layer and as support for the fabrication of a bridge to connect the central end of the coils to the ground shield. The micro-transformer have been characterized with impedance meter up to 100 MHz, and completed to 1 GHz using vector network analyzer.

Domaines

Electronique
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Dates et versions

hal-01058212 , version 1 (26-08-2014)

Identifiants

Citer

Faouzi Kahlouche, Khamis Youssouf, Mahamat Hassan Béchir, Stéphane Capraro, A. Siblini, et al.. Fabrication and characterization of a planar interleaved micro-transformer with magnetic core. Microelectronics Journal, 2014, 45 (7), pp.893-897. ⟨10.1016/j.mejo.2014.03.003⟩. ⟨hal-01058212⟩
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