Methodology for Integrated Failure-Cause Diagnosis with Bayesian Approach : Application to Semiconductor Manufacturing Equipment - Archive ouverte HAL Access content directly
Conference Papers Year : 2014

Methodology for Integrated Failure-Cause Diagnosis with Bayesian Approach : Application to Semiconductor Manufacturing Equipment

Éric Zamaï
Stephane Hubac
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hal-01044952 , version 1 (24-07-2014)

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  • HAL Id : hal-01044952 , version 1

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Asma Abu Samah, Muhammad Kashif Shahzad, Éric Zamaï, Stephane Hubac. Methodology for Integrated Failure-Cause Diagnosis with Bayesian Approach : Application to Semiconductor Manufacturing Equipment. Second European Conference of the Prognostics and Health Management Society 2014, Jul 2014, Nantes, France. ⟨hal-01044952⟩
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