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Communication Dans Un Congrès Année : 2014

Phononic crystals patterning by e-beam lithography "dots on the fly" methodology for integration into thermoelectric energy converters

Résumé

A phononic engineered pattern is conceptualized and realized to hinder the phonons propagation and reduce the lattice thermal conductivity. The pattern fabrication methodology is shown and the procedure of integration on suspended membrane for thermal conductivity characterization is depicted. The expected experimental trends are expected to be justified and supported by thermal conductivity measurements and molecular dynamic simulations.
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Dates et versions

hal-01020281 , version 1 (08-07-2014)

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  • HAL Id : hal-01020281 , version 1

Citer

Valeria Lacatena, Maciej Haras, J.F. Robillard, Stéphane Monfray, Thomas Skotnicki, et al.. Phononic crystals patterning by e-beam lithography "dots on the fly" methodology for integration into thermoelectric energy converters. 17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p. ⟨hal-01020281⟩
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