Characterization of the thermal conductivity of insulating thin films by Scanning Thermal Microscopy - Archive ouverte HAL
Article Dans Une Revue Microelectronics Journal Année : 2013

Characterization of the thermal conductivity of insulating thin films by Scanning Thermal Microscopy

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hal-01018078 , version 1 (03-07-2014)

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Séverine Gomès, P. Newby, B. Canut, K. Termentzidis, O. Marty, et al.. Characterization of the thermal conductivity of insulating thin films by Scanning Thermal Microscopy. Microelectronics Journal, 2013, 44 (11), pp.1029-1034. ⟨10.1016/j.mejo.2012.07.006⟩. ⟨hal-01018078⟩
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