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              <p>Nous présentons ici l'étude de la faisabilité d'une nouvelle terminaison de jonction utilisant une tranchée profonde de 70 m de large et de 100 m de profondeur remplie par un matériau diélectrique. Les simulations, avec Sentaurus TCAD, ont montré une tenue en tension supérieure à 1200 V pour cette terminaison. Le remplissage de la tranchée de terminaison par un diélectrique étant indispensable, nous avons donc étudié la possibilité d'utiliser un polyimide à faible constante diélectrique. Outre ses bonnes caractéristiques électriques, le BenzoCycloButene (BCB) a permis un bon remplissage des tranchées profondes. Enfin, nous avons étudié le polissage du BCB par la technique de polissage mécano-chimique (CMP) dans le but d'aplanir et éventuellement de supprimer l'excès de BCB sur la surface de la plaque. En utilisant une suspension de polissage d'un pH 2,5 (acide), nous avons obtenu une vitesse de gravure par polissage d'environ 0,24 m/min pour le BCB. L'état de surface du BCB après CMP présente une rugosité, Ra, de 1,04 nm mesurée par AFM.</p>
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          <idno type="ROR">https://ror.org/033p9g875</idno>
          <orgName>Institut National Polytechnique (Toulouse)</orgName>
          <orgName type="acronym">Toulouse INP</orgName>
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            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.inp-toulouse.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
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</TEI>