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Communication Dans Un Congrès Année : 2014

Macroscopic exploration and visual quality inspection of thin film deposit

Résumé

Micro/nanotechnologies evolve causing an evolution of surface characterization systems of thin films. Today, these systems are not adapted to the future needs (or current) to characterize and qualify a large effective area within industrial production. This concerns the thin film active layers or simple mask for structuring the surface. This paper proposes a quality control method for thin films of self-assembled particles and high quality. This method is founded on the intersection of several skills available in our laboratories: Industrial process of visual inspection, optical methods for quality control (large area relative to the state of the art) and advances in micro/nanotechnology (CEA/Liten).
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Dates et versions

hal-00983577 , version 1 (25-04-2014)

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Citer

Simon-Frédéric Desage, Gilles Pitard, Hugues Favreliere, Maurice Pillet, Olivier Dellea, et al.. Macroscopic exploration and visual quality inspection of thin film deposit. SPIE ADVANCED LITHOGRAPHY, Feb 2014, San Jose, United States. pp.NC, ⟨10.1117/12.2046246⟩. ⟨hal-00983577⟩
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