<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-00982226</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-01T20:30:41+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">X-ray reflectometry study of diamond-like carbon films prepared by plasma enhanced chemical vapor deposition in a low pressure inductively coupled plasma</title>
            <author role="aut">
              <persName>
                <forename type="first">F.</forename>
                <surname>Salah</surname>
              </persName>
              <idno type="halauthorid">190807-0</idno>
              <affiliation ref="#struct-227569"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">B.</forename>
                <surname>Harzallah</surname>
              </persName>
              <idno type="halauthorid">190808-0</idno>
              <affiliation ref="#struct-227569"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">A.</forename>
                <surname>van Der Lee</surname>
              </persName>
              <email type="md5">997691d15fb6382bf1e55f60880b61c7</email>
              <email type="domain">umontpellier.fr</email>
              <idno type="idhal" notation="string">arie-van-der-lee</idno>
              <idno type="idhal" notation="numeric">746496</idno>
              <idno type="halauthorid" notation="string">147578-746496</idno>
              <idno type="IDREF">https://www.idref.fr/226110141</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-4567-1831</idno>
              <idno type="VIAF">https://viaf.org/viaf/512152636158520051419</idno>
              <affiliation ref="#struct-767"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Benoit</forename>
                <surname>Angleraud</surname>
              </persName>
              <idno type="halauthorid">735575-0</idno>
              <affiliation ref="#struct-896"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">T.</forename>
                <surname>Begou</surname>
              </persName>
              <idno type="halauthorid">195741-0</idno>
              <affiliation ref="#struct-896"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Agnès</forename>
                <forename type="middle">A.</forename>
                <surname>Granier</surname>
              </persName>
              <idno type="halauthorid">218329-0</idno>
              <affiliation ref="#struct-896"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Richard</forename>
                <surname>BASCHERA</surname>
              </persName>
              <email type="md5">9b8e000be51582da953302f05a03a030</email>
              <email type="domain">cnrs-imn.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2014-04-23 15:09:14</date>
              <date type="whenModified">2026-01-12 13:00:03</date>
              <date type="whenReleased">2014-04-23 15:09:14</date>
              <date type="whenProduced">2013</date>
              <ref type="externalLink" target="https://api.istex.fr/ark:/67375/6H6-F19QZC16-R/fulltext.pdf?sid=hal"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="108653">
                <persName>
                  <forename>Richard</forename>
                  <surname>BASCHERA</surname>
                </persName>
                <email type="md5">9b8e000be51582da953302f05a03a030</email>
                <email type="domain">cnrs-imn.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-00982226</idno>
            <idno type="halUri">https://hal.science/hal-00982226</idno>
            <idno type="halBibtex">salah:hal-00982226</idno>
            <idno type="halRefHtml">&lt;i&gt;Thin Solid Films&lt;/i&gt;, 2013, 537, pp.102. &lt;a target="_blank" href="https://dx.doi.org/10.1016/j.tsf.2013.04.033"&gt;&amp;#x27E8;10.1016/j.tsf.2013.04.033&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Thin Solid Films, 2013, 537, pp.102. &amp;#x27E8;10.1016/j.tsf.2013.04.033&amp;#x27E9;</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-NANTES">Université de Nantes</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-MONTP2">Université Montpellier II - Sciences et Techniques du Languedoc</idno>
            <idno type="stamp" n="ENSC-MONTPELLIER">Ecole Nationale Supérieure de Chimie de Montpellier</idno>
            <idno type="stamp" n="IEM">Institut Européen des membranes</idno>
            <idno type="stamp" n="IMN">Institut des matériaux Jean Rouxel</idno>
            <idno type="stamp" n="PCM" corresp="IMN">PCM</idno>
            <idno type="stamp" n="INC-CNRS">Institut de Chimie du CNRS</idno>
            <idno type="stamp" n="CHIMIE">Chimie</idno>
            <idno type="stamp" n="UNIV-MONTPELLIER">Université de Montpellier</idno>
            <idno type="stamp" n="NANTES-UNIVERSITE">Nantes Université</idno>
            <idno type="stamp" n="UNIV-NANTES-AV2022">Université de Nantes</idno>
            <idno type="stamp" n="UM1-UM2" corresp="UNIV-MONTPELLIER">Université Montpellier 1 - Université Montpellier 2</idno>
            <idno type="stamp" n="TEST2-HALCNRS">TEST2-HALCNRS</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">X-ray reflectometry study of diamond-like carbon films prepared by plasma enhanced chemical vapor deposition in a low pressure inductively coupled plasma</title>
                <author role="aut">
                  <persName>
                    <forename type="first">F.</forename>
                    <surname>Salah</surname>
                  </persName>
                  <idno type="halauthorid">190807-0</idno>
                  <affiliation ref="#struct-227569"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">B.</forename>
                    <surname>Harzallah</surname>
                  </persName>
                  <idno type="halauthorid">190808-0</idno>
                  <affiliation ref="#struct-227569"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">A.</forename>
                    <surname>van Der Lee</surname>
                  </persName>
                  <email type="md5">997691d15fb6382bf1e55f60880b61c7</email>
                  <email type="domain">umontpellier.fr</email>
                  <idno type="idhal" notation="string">arie-van-der-lee</idno>
                  <idno type="idhal" notation="numeric">746496</idno>
                  <idno type="halauthorid" notation="string">147578-746496</idno>
                  <idno type="IDREF">https://www.idref.fr/226110141</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-4567-1831</idno>
                  <idno type="VIAF">https://viaf.org/viaf/512152636158520051419</idno>
                  <affiliation ref="#struct-767"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Benoit</forename>
                    <surname>Angleraud</surname>
                  </persName>
                  <idno type="halauthorid">735575-0</idno>
                  <affiliation ref="#struct-896"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">T.</forename>
                    <surname>Begou</surname>
                  </persName>
                  <idno type="halauthorid">195741-0</idno>
                  <affiliation ref="#struct-896"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Agnès</forename>
                    <forename type="middle">A.</forename>
                    <surname>Granier</surname>
                  </persName>
                  <idno type="halauthorid">218329-0</idno>
                  <affiliation ref="#struct-896"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">19622</idno>
                <idno type="issn">0040-6090</idno>
                <title level="j">Thin Solid Films</title>
                <imprint>
                  <publisher>Elsevier</publisher>
                  <biblScope unit="volume">537</biblScope>
                  <biblScope unit="pp">102</biblScope>
                  <date type="datePub">2013</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1016/j.tsf.2013.04.033</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">Diamond-like carbon</term>
                <term xml:lang="en">Thin films</term>
                <term xml:lang="en">Plasma-enhanced chemical vapor deposition</term>
                <term xml:lang="en">Reflectometry</term>
              </keywords>
              <classCode scheme="halDomain" n="phys.cond.cm-ms">Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>In this work we probe the structural properties of amorphous hydrogenated carbon thin films prepared by plasma-enhanced chemical vapor deposition in a low pressure inductively coupled plasma using X-ray reflectometry in order to study the effect of varying the ion energy on the density of these films. The ion energy is varied by varying the RF power used to bias the substrate. It is shown that a very low ion energy is already sufficient to obtain a dense diamond-like carbon (DLC) film, in contrast with other deposition techniques where much higher ion energies are required to obtain a dense DLC film. The results of this study are corroborated by Raman spectroscopy and ellipsometry measurements. The X-ray reflectometry data analysis is detailed in order to highlight some methodological problems encountered during the data fitting which could lead to an incorrect interpretation of the measured curves.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-227569" status="VALID">
          <orgName>Laboratoire Physico-Chimie des Matériaux [Monastir]</orgName>
          <desc>
            <address>
              <addrLine>LR01ES19 - Département de Physique, Faculté des Sciences de Monastir, BP 22, 5019 Monastir, Tunisia</addrLine>
              <country key="TN"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-6267" type="direct"/>
            <relation active="#struct-302159" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-767" status="OLD">
          <idno type="ISNI">0000000417572291</idno>
          <idno type="RNSR">199412064U</idno>
          <idno type="ROR">https://ror.org/05rtchs68</idno>
          <orgName>Institut Européen des membranes</orgName>
          <orgName type="acronym">IEM</orgName>
          <date type="start">1995-01-01</date>
          <date type="end">2014-12-31</date>
          <desc>
            <address>
              <addrLine>1919, route de Mende - BP 5051 - 34293 Montpellier cedex 5</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.iemm.univ-montp2.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-92690" type="direct"/>
            <relation active="#struct-300370" type="direct"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR5635" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-896" status="OLD">
          <idno type="IdRef">148741657</idno>
          <idno type="ISNI">0000000403859937</idno>
          <idno type="RNSR">199612297N</idno>
          <idno type="ROR">https://ror.org/00cqpd580</idno>
          <orgName>Institut des Matériaux Jean Rouxel</orgName>
          <orgName type="acronym">IMN</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>Campus Sciences 2 Rue de la Houssinière - BP 32229 44322 NANTES CEDEX 3</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs-imn.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-97058" type="direct"/>
            <relation active="#struct-93263" type="indirect"/>
            <relation active="#struct-300405" type="direct"/>
            <relation name="93263" active="#struct-93263" type="indirect"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR6502" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-6267" status="VALID">
          <idno type="IdRef">084314990</idno>
          <orgName>Faculté des Sciences de Monastir</orgName>
          <orgName type="acronym">FSM</orgName>
          <date type="start">1978-01-01</date>
          <desc>
            <address>
              <addrLine>Université de Monastir, Avenue de l'environnement 5019 Monastir Tunisie</addrLine>
              <country key="TN"/>
            </address>
            <ref type="url">http://www.fsm.rnu.tn/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-302159" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-302159" status="VALID">
          <idno type="IdRef">139267263</idno>
          <idno type="ISNI">0000 0004 0593 5040</idno>
          <idno type="ROR">https://ror.org/00nhtcg76</idno>
          <idno type="Wikidata">Q3551637</idno>
          <orgName>Université de Monastir - University of Monastir - جامعة المنستير</orgName>
          <orgName type="acronym">UM</orgName>
          <date type="start">2004-01-01</date>
          <desc>
            <address>
              <addrLine>BP 56 Avenue Taher Hadded، Monastir 5000</addrLine>
              <country key="TN"/>
            </address>
            <ref type="url">http://www.um.rnu.tn/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-92690" status="OLD">
          <orgName>Université Montpellier 2 - Sciences et Techniques</orgName>
          <orgName type="acronym">UM2</orgName>
          <date type="end">2014-12-31</date>
          <desc>
            <address>
              <addrLine>Place Eugène Bataillon - 34095 Montpellier cedex 5</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-montp2.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300370" status="OLD">
          <idno type="ROR">https://ror.org/03sgyqj04</idno>
          <orgName>Ecole Nationale Supérieure de Chimie de Montpellier</orgName>
          <orgName type="acronym">ENSCM</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>8 Rue de l'Ecole Normale 34296 Montpellier Cedex 5</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.enscm.fr</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-341038" status="VALID">
          <idno type="IdRef">232435103</idno>
          <idno type="ISNI">000000010626358X</idno>
          <idno type="ROR">https://ror.org/02cte4b68</idno>
          <orgName>Institut de Chimie - CNRS Chimie</orgName>
          <orgName type="acronym">INC-CNRS</orgName>
          <date type="start">2009-10-01</date>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs.fr/inc</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-97058" status="OLD">
          <orgName>Université de Nantes - UFR des Sciences et des Techniques</orgName>
          <orgName type="acronym">UN UFR ST</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>2, rue de la Houssinière - BP 92208 - 44322 Nantes cedex 3</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.sciences-techniques.univ-nantes.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-93263" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-93263" status="OLD">
          <idno type="IdRef">026403447</idno>
          <idno type="ROR">https://ror.org/03gnr7b55</idno>
          <orgName>Université de Nantes</orgName>
          <orgName type="acronym">UN</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>1, quai de Tourville - BP 13522 - 44035 Nantes cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-nantes.fr/</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-300405" status="OLD">
          <idno type="IdRef">068449399</idno>
          <orgName>Ecole Polytechnique de l'Université de Nantes</orgName>
          <orgName type="acronym">EPUN</orgName>
          <date type="end">2021-12-31</date>
          <desc>
            <address>
              <addrLine>Campus Chantrerie : Rue Christian Pauc - CS 50609 - 44306 Nantes Cedex 3Campus Gavy : Gavy Océanis -  CS 70152 - 44603 Saint-Nazaire CedexCampus Courtaisière : 18 Boulevard Gaston Defferre - 85035 La Roche-sur-Yon Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://web.polytech.univ-nantes.fr/l-ecole/</ref>
          </desc>
          <listRelation>
            <relation name="93263" active="#struct-93263" type="direct"/>
          </listRelation>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>