An LQG/LTR approach towards piezoactuator vibration reduction with observer-based hysteresis compensation
Résumé
This paper presents a SISO robust control of some lightly damped micro-/nanopositioning system equipped with a piezoactuator. The adverse phenomenon of nonlinear hysteresis in the actuator is first compensated using an observer-based approach. Then an LQG/LTR method is proposed to additionally reduce vibrations affecting the system in a higher frequency range. Illustrative experimental results show a signi ficant improvement of the closed-loop system behaviour with respect to the open-loop one.