Alignment and nano-connections of isolated carbon nanotubes

We report a new approach for the alignment and the electrical nano-connection of isolated carbon nanotubes (CNTs). Through a novel combination of proven technics, we have been able to align isolated carbon nanotubes and selectively contact those CNTs by high resolution electron beam lithography (HREBL). Resistance versus temperature (R(T)) experiments have been carried out to determine the reliability of the metal-CNTs interface and to probe the electronic conductance of the CNT.

Mots clés

Carbon nanotubes Molecular combing Nanofabrication Electronic transport

Domaines

Matériaux Matériaux Micro et nanotechnologies/Microélectronique

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Sagnes_11135.pdf (489.4 Ko)

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https://hal.science/hal-00958084

Soumis le : mardi 11 mars 2014-16:15:59

Dernière modification le : vendredi 17 mai 2024-16:18:03

Archivage à long terme le : mercredi 11 juin 2014-12:55:18

Dates et versions

hal-00958084 , version 1 (11-03-2014)

Identifiants

HAL Id : hal-00958084 , version 1
DOI : 10.1016/S0167-9317(03)00130-8
OATAO : 11135

Citer

Mathieu Sagnes, Jean-Marc Broto, Bertrand Raquet, Thierry Ondarçuhu, Christophe Laurent, et al.. Alignment and nano-connections of isolated carbon nanotubes. Microelectronic Engineering, 2003, vol. 67-68, pp. 683-689. ⟨10.1016/S0167-9317(03)00130-8⟩. ⟨hal-00958084⟩

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