Methane Conversion in a N2-CH4 Radiofrequency Discharge
Résumé
The carbon conversion in a N2-CH4 radiofrequency (RF) discharge is investigated by analyzing both the gas phase and the dust produced. HCN is identified as the main reactive product and both HCN and NH3 are quantified. This quantification allows determining the carbon conversion yield from CH4 to HCN, which appears to be surprisingly low. The comparison of the infrared absorbance spectra between dust produced in two similar RF plasma setups emphasizes small differences on the CH3/CH2 bonds ratio in the samples. This difference is explained by the aging processes of dust within the plasma.