Particle generation study in a methane discharge by mass spectrometry and DC self-bias voltage evolutions for different powers - Archive ouverte HAL
Communication Dans Un Congrès Année : 2013

Particle generation study in a methane discharge by mass spectrometry and DC self-bias voltage evolutions for different powers

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hal-00949380 , version 1 (19-02-2014)

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  • HAL Id : hal-00949380 , version 1

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Jean-François Lagrange, François Faubert, Isabelle Géraud-Grenier, Véronique Massereau-Guilbaud. Particle generation study in a methane discharge by mass spectrometry and DC self-bias voltage evolutions for different powers. XXXI International Conference on the Physics of Ionized Gases (ICPIG), Jul 2013, Grenade, Spain. pp.PS3-084. ⟨hal-00949380⟩
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