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Communication Dans Un Congrès Année : 2010

Ultra-smooth LiNbO3 micro and nano structures for photonic applications

Résumé

We report on two approaches to achieve ultra-smooth structures on lithium niobate (LiNbO3) substrates. The first method relies on ICP-RIE (inductively coupled-reactive ionic etching) or on RIE, and is exploited here for the fabrication of rods with smooth etched surfaces. A series of tests have been performed with fluorine gases. Nanometric rods with 200, 400 or 600 nm diameters, with a periodicity of 400, 800 and 1200 nm respectively and etched angles close to 68° for the RIE process and 75° for the ICP-RIE process have been fabricated. The second process is based on "optical grade dicing" and is dedicated to the fabrication of deep-etched ridge waveguides. First optical characterization results are reported. They show optical propagation losses value close to 0.1 dB/cm.
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Dates et versions

hal-00945266 , version 1 (12-02-2014)

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  • HAL Id : hal-00945266 , version 1

Citer

Gwenn Ulliac, Blandine Guichardaz, Jean-Yves Rauch, Samuel Queste, Sarah Benchabane, et al.. Ultra-smooth LiNbO3 micro and nano structures for photonic applications. Proceedings of the 36th International Conference on Micro- and Nano-Engineering (MNE) 2010, Jan 2010, Italy. pp.2417 - 2419. ⟨hal-00945266⟩
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