Nanostructuration of lithium niobate substrates for sensing applications
Résumé
We present LiNbO3 nanostructures with ultra-smoothed walls realized by FIB or ICP-RIE. Besides, we de-scribe an original approach based on "optical grade dicing" for fabricating ridges dedicated to the coupling of light into photonic (PhC) cavities. Experimental transmissions responses through PhC cavities are finally presented.