Probing dusty-plasma/surface interactions with a heat flux microsensor - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Applied Physics Letters Année : 2012

Probing dusty-plasma/surface interactions with a heat flux microsensor

Résumé

Heat flux microsensor--a thermopile with millisecond response time--was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm2. Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30%) in the energy flux was observed during the agglomeration phase.

Dates et versions

hal-00943785 , version 1 (08-02-2014)

Identifiants

Citer

Sergey Abolmasov, Pierre-Antoine Cormier, A. Torres Rios, Remi Dussart, Nadjib Semmar, et al.. Probing dusty-plasma/surface interactions with a heat flux microsensor. Applied Physics Letters, 2012, pp.100, 1, 011601. ⟨10.1063/1.3674290⟩. ⟨hal-00943785⟩
104 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More