Parametric study of self-forming ZnO nanowall network with honeycomb structure by pulsed laser deposition
Résumé
The successful synthesis of catalyst free zinc oxide (ZnO) Nanowall networks with honeycomb like struc-ture by Pulsed Laser Deposition (PLD) is demonstrated in this paper. The synthesis was conducted directlyon Silicon (Si) (1 0 0) and Glass-ITO substrates without the intermediate of metal catalyst, template orchemical etching. Kinetic of growth and effects of gas pressure and substrate temperature were studiedby depositing ZnO films on P type Si (1 0 0) substrates with different deposition parameters. The opti-mized growth parameters were found as: 10 mTorr oxygen pressure, 600◦C substrate temperature, anddeposition duration equal or higher than 10 min. X-Ray Diffraction (XRD), Scanning Electron Microscopy(SEM) and Photoluminescence (PL) measurements were used to investigate structural, microstructuraland optical properties of ZnO Nanowall networks produced. They exhibit a non-uniform size high qualityhoneycomb structure with low deep level defects.