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Communication Dans Un Congrès Année : 1999

Graded and step index buried optical waveguides fabricated from p-type porous silicon : Processing and measurements

Résumé

The realisation of optical buried waveguides fabricated from porous silicon layers is presented. The refractive index of porous silicon layer varies according to its porosity and its oxidisation process conditions. So either step or graded index waveguides are achieved. These waveguides are formed by a localised anodisation of heavily doped P-type silicon wafers. Measurements at a wavelength of l.ôum yield waveguide losses below 4 dB/cm.
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Dates et versions

hal-00935113 , version 1 (07-02-2014)

Identifiants

  • HAL Id : hal-00935113 , version 1

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Joël Charrier, Cyril Lupi, Lazhar Haji, Eric Tanguy, Christian Boisrobert. Graded and step index buried optical waveguides fabricated from p-type porous silicon : Processing and measurements. 5th Optical Fibre Measurement Conference, Sep 1999, Nantes, France. pp.96. ⟨hal-00935113⟩
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