Article Dans Une Revue Applied Physics Letters Année : 2013

Femtosecond laser fabrication of micro and nano-disks in single layer graphene using vortex Bessel beams

Résumé

We report the fabrication of micro and nano-disks in single layer chemical vapor deposition graphene on glass substrate using femtosecond laser ablation with vortex Bessel beams. The fabricated graphene disks with diameters ranging from 650 nm to 4 μm were characterized by spatially resolved micro-Raman spectroscopy. The variation of ablation threshold was investigated as a function of the number of pulses showing an incubation effect. A very high degree of size control of the fabricated graphene disks is enabled using a sequence of femtosecond pulses with different vortex orders.

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hal-00924224 , version 1 (06-01-2014)

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Benjamin Wetzel, Chen Xie, Pierre-Ambroise Lacourt, John Michael Dudley, François Courvoisier. Femtosecond laser fabrication of micro and nano-disks in single layer graphene using vortex Bessel beams. Applied Physics Letters, 2013, 103, pp.241111. ⟨10.1063/1.4846415⟩. ⟨hal-00924224⟩
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