Journal Articles
Journal of Non-Crystalline Solids
Year : 1995
Pavel Bulkin : Connect in order to contact the contributor
https://hal.science/hal-00915405
Submitted on : Saturday, December 7, 2013-6:09:52 PM
Last modification on : Wednesday, August 24, 2022-6:29:06 PM
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- HAL Id : hal-00915405 , version 1
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Pavel Bulkin, P. L. Swart, B. M. Lacquet. Effect of process parameters on the properties of electron cyclotron resonance plasma deposited silicon-oxynitride. Journal of Non-Crystalline Solids, 1995, pp.403-408. ⟨hal-00915405⟩
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