<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-00914163</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-23T11:34:13+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Two-dimensional photonic crystals by focused-ion-beam etching of multilayer membranes</title>
            <author role="aut">
              <persName>
                <forename type="first">K.</forename>
                <surname>Wang</surname>
              </persName>
              <idno type="halauthorid">63323-0</idno>
              <affiliation ref="#struct-134"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">P.</forename>
                <surname>Filloux</surname>
              </persName>
              <idno type="halauthorid">376497-0</idno>
              <affiliation ref="#struct-1362"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">N.</forename>
                <surname>Paraire</surname>
              </persName>
              <idno type="halauthorid">257746-0</idno>
              <affiliation ref="#struct-1362"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">P.</forename>
                <surname>Roca I Cabarrocas</surname>
              </persName>
              <idno type="halauthorid">783587-0</idno>
              <affiliation ref="#struct-1165"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Pavel</forename>
                <surname>Bulkin</surname>
              </persName>
              <email type="md5">915a5671fd4f71e01ce4f9ba27a3cce1</email>
              <email type="domain">polytechnique.edu</email>
              <idno type="idhal" notation="string">pavel-bulkin</idno>
              <idno type="idhal" notation="numeric">180547</idno>
              <idno type="halauthorid" notation="string">17029-180547</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/W-6710-2019</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-5591-3470</idno>
              <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=V7NJwj4AAAAJ&amp;hl=en</idno>
              <idno type="IDREF">https://www.idref.fr/253127122</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/W-6710-2019</idno>
              <affiliation ref="#struct-1165"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Pavel</forename>
                <surname>Bulkin</surname>
              </persName>
              <email type="md5">100ecbce97b33f06a22b7faa9065415c</email>
              <email type="domain">poly.polytechnique.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2013-12-04 23:12:44</date>
              <date type="whenModified">2025-11-21 14:50:02</date>
              <date type="whenReleased">2013-12-04 23:12:44</date>
              <date type="whenProduced">2003</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="188541">
                <persName>
                  <forename>Pavel</forename>
                  <surname>Bulkin</surname>
                </persName>
                <email type="md5">100ecbce97b33f06a22b7faa9065415c</email>
                <email type="domain">poly.polytechnique.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-00914163</idno>
            <idno type="halUri">https://hal.science/hal-00914163</idno>
            <idno type="halBibtex">wang:hal-00914163</idno>
            <idno type="halRefHtml">&lt;i&gt;Journal of Vacuum Science and Technology&lt;/i&gt;, 2003, pp.966-969</idno>
            <idno type="halRef">Journal of Vacuum Science and Technology, 2003, pp.966-969</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="X">École polytechnique</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-PSUD">Université Paris Sud - Paris XI</idno>
            <idno type="stamp" n="X-DEP-CHIM">Département de chimie de l’École polytechnique</idno>
            <idno type="stamp" n="X-DEP-PHYS">Département de physique de l’École polytechnique</idno>
            <idno type="stamp" n="LPICM" corresp="X">Laboratoire de physique des interfaces et des couches minces</idno>
            <idno type="stamp" n="UNIV-PARIS-SACLAY">Université Paris-Saclay</idno>
            <idno type="stamp" n="UNIV-PSUD-SACLAY" corresp="UNIV-PARIS-SACLAY">Université Paris Sud pour Paris Saclay</idno>
            <idno type="stamp" n="GS-PHYSIQUE">Graduate School Physique</idno>
            <idno type="stamp" n="LPSO">Laboratoire de Physique des Solides d'Orsay</idno>
            <idno type="stamp" n="URP-LPS">Laboratoire de Psychologie Sociale : contextes et régulation</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Two-dimensional photonic crystals by focused-ion-beam etching of multilayer membranes</title>
                <author role="aut">
                  <persName>
                    <forename type="first">K.</forename>
                    <surname>Wang</surname>
                  </persName>
                  <idno type="halauthorid">63323-0</idno>
                  <affiliation ref="#struct-134"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">P.</forename>
                    <surname>Filloux</surname>
                  </persName>
                  <idno type="halauthorid">376497-0</idno>
                  <affiliation ref="#struct-1362"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">N.</forename>
                    <surname>Paraire</surname>
                  </persName>
                  <idno type="halauthorid">257746-0</idno>
                  <affiliation ref="#struct-1362"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">P.</forename>
                    <surname>Roca I Cabarrocas</surname>
                  </persName>
                  <idno type="halauthorid">783587-0</idno>
                  <affiliation ref="#struct-1165"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Pavel</forename>
                    <surname>Bulkin</surname>
                  </persName>
                  <email type="md5">915a5671fd4f71e01ce4f9ba27a3cce1</email>
                  <email type="domain">polytechnique.edu</email>
                  <idno type="idhal" notation="string">pavel-bulkin</idno>
                  <idno type="idhal" notation="numeric">180547</idno>
                  <idno type="halauthorid" notation="string">17029-180547</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/W-6710-2019</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-5591-3470</idno>
                  <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=V7NJwj4AAAAJ&amp;hl=en</idno>
                  <idno type="IDREF">https://www.idref.fr/253127122</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/W-6710-2019</idno>
                  <affiliation ref="#struct-1165"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">16453</idno>
                <idno type="issn">0022-5355</idno>
                <title level="j">Journal of Vacuum Science and Technology</title>
                <imprint>
                  <publisher>American Vacuum Society (AVS)</publisher>
                  <biblScope unit="pp">966-969</biblScope>
                  <date type="datePub">2003</date>
                </imprint>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="spi">Engineering Sciences [physics]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-134" status="OLD">
          <orgName>Laboratoire de Physique des Solides</orgName>
          <orgName type="acronym">LPS</orgName>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>Bat. 510 91405 Orsay cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.lps.u-psud.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-92966" type="direct"/>
            <relation name="UMR8502" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-1362" status="OLD">
          <orgName>Institut d'électronique fondamentale</orgName>
          <orgName type="acronym">IEF</orgName>
          <date type="end">2016-05-31</date>
          <desc>
            <address>
              <addrLine>bat. 220 Av Georges Clémenceau 91405 ORSAY CEDEX</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.u-psud.fr/ief/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-92966" type="direct"/>
            <relation name="UMR8622" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-1165" status="VALID">
          <idno type="IdRef">197372244</idno>
          <idno type="ISNI">0000000403702315</idno>
          <idno type="RNSR">199719345V</idno>
          <idno type="ROR">https://ror.org/023f9y602</idno>
          <idno type="Wikidata">Q30262273</idno>
          <orgName>Laboratoire de Physique des Interfaces et des Couches Minces</orgName>
          <orgName type="acronym">LPICM</orgName>
          <desc>
            <address>
              <addrLine>Route de Saclay 91128 Palaiseau Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://lpicm.cnrs.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-300340" type="direct"/>
            <relation active="#struct-563936" type="indirect"/>
            <relation name="UMR7647" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-92966" status="OLD">
          <idno type="ROR">https://ror.org/028rypz17</idno>
          <orgName>Université Paris-Sud - Paris 11</orgName>
          <orgName type="acronym">UP11</orgName>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>Bâtiment 300 - 91405 Orsay cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.u-psud.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300340" status="VALID">
          <idno type="IdRef">027309320</idno>
          <idno type="ISNI">0000000121581279</idno>
          <idno type="ROR">https://ror.org/05hy3tk52</idno>
          <idno type="Wikidata">Q273626</idno>
          <orgName>École polytechnique</orgName>
          <orgName type="acronym">X</orgName>
          <date type="start">1794-03-11</date>
          <desc>
            <address>
              <addrLine>Route de Saclay, 91128 Palaiseau Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.polytechnique.edu/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-563936" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-563936" status="VALID">
          <idno type="IdRef">238327159</idno>
          <idno type="ISNI">0000000502717600</idno>
          <idno type="ROR">https://ror.org/042tfbd02</idno>
          <idno type="Wikidata">Q48759778</idno>
          <orgName>Institut Polytechnique de Paris</orgName>
          <orgName type="acronym">IP Paris</orgName>
          <date type="start">2019-06-02</date>
          <desc>
            <address>
              <addrLine>Route de Saclay, 91120 Palaiseau Cedex, France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.ip-paris.fr</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>