Microcrystalline silicon films and solar cells deposited at high rate by Matrix Distributed Electron Cyclotron Resonance (MDECR) plasma - Archive ouverte HAL Access content directly
Journal Articles physica status solidi (c) Year : 2010
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hal-00913541 , version 1 (03-12-2013)

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  • HAL Id : hal-00913541 , version 1

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Laurent Kroely, S. K. Ram, Pavel Bulkin, P. Roca I Cabarrocas. Microcrystalline silicon films and solar cells deposited at high rate by Matrix Distributed Electron Cyclotron Resonance (MDECR) plasma. physica status solidi (c), 2010, pp.517-520. ⟨hal-00913541⟩
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