Nanoscale transport measurements with multiple probe scanning tunneling microscopy - Archive ouverte HAL
Communication Dans Un Congrès Année : 2013

Nanoscale transport measurements with multiple probe scanning tunneling microscopy

Maxime Berthe
Corentin Durand
R. Leturcq
  • Fonction : Auteur
B. Grandidier

Résumé

Development of nanometer-sacle probing techniques have become imperative for current flow and resistivity measurements with nanometer scale spatial resolution in a variety of materials and devices. The use of weakly coupled scanning tunneling probes to detect transport phenomena appears to be an appropriate approach. We will describe a new setup, where the unique combination of four scanning tunneling microscope probe tips and a scanning electron microscope in ultra high vacuum allows 4-point contact measurements and function testing of nanodevices within complex structures and integrated circuits. Such a tool has considerable potential, as it does not need any extra electrodes on the specimen and enables arbitrary arrangements of probes, with the highest spatial resolution, on isolated semiconductor nanowires, for example.
Fichier principal
Vignette du fichier
metrology_metr2013_13001.pdf (985.21 Ko) Télécharger le fichier
Origine Publication financée par une institution
Licence

Dates et versions

hal-00877775 , version 1 (11-07-2022)

Licence

Identifiants

Citer

Maxime Berthe, Corentin Durand, R. Leturcq, B. Grandidier. Nanoscale transport measurements with multiple probe scanning tunneling microscopy. 16th International Congress of Metrology, 2013, Paris, France. S20 Nanotechnology, 13001, 4 p., ⟨10.1051/metrology/201313001⟩. ⟨hal-00877775⟩

Collections

IEMN
31 Consultations
15 Téléchargements

Altmetric

Partager

More