Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Optical Materials Express Année : 2013

Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs

Youness Laaroussi
  • Fonction : Auteur
  • PersonId : 935207
Olivier Gauthier-Lafaye
Benjamin Reig
Guilhem Almuneau

Résumé

A new mid-infrared (MIR) Vertical Cavity Surface Emitting Laser (VCSEL) structure is proposed. We have integrated to the VCSEL structure both an oxide aperture for lateral confinement, and a sub-wavelength high-contrast-grating top mirror. Upon the GaSb-based half-VCSEL, we have grown a metamorphic AlGaAs heterostructure to enable thermal oxidation and grating mirror fabrication steps. A methodology based on optimization and anti-optimization methods has been used to design the optical grating, with improved parameter tolerances regarding processing errors. Finally, we show the complete fabrication of an electrically-pumped MIR monolithic VCSEL structure implementing both oxide confinement and a subwavelength grating top mirror.
Fichier principal
Vignette du fichier
ome-3-10-1576.pdf (2.8 Mo) Télécharger le fichier
Origine : Fichiers éditeurs autorisés sur une archive ouverte

Dates et versions

hal-00863150 , version 1 (22-06-2021)

Identifiants

Citer

Youness Laaroussi, Christyves Chevallier, Frédéric Genty, Nicolas Fressengeas, Laurent Cerutti, et al.. Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs. Optical Materials Express, 2013, 3 (10), pp.1576-1585. ⟨10.1364/OME.3.001576⟩. ⟨hal-00863150⟩
221 Consultations
68 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More