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Article Dans Une Revue Journal of Low Temperature Physics Année : 2013

Stressed silicon nitride nanomechanical resonators at helium temperatures

Résumé

We have characterized the mechanical resonance properties (both linear and nonlinear) of various doubly-clamped silicon nitride nanomechanical resonators, each with a different intrinsic tensile stress. The measurements were carried out at 4 K and the magnetomotive technique was used to drive and detect the motion of the beams. The resonant frequencies of the beams are in the megahertz range, with quality factors of the order of 104.We also measure the dynamic range of the beams and their nonlinear (Duffing) behaviour
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Dates et versions

hal-00861790 , version 1 (17-12-2013)

Identifiants

Citer

Martial Defoort, Kunal Lulla, Christophe Blanc, Hossein Ftouni, Olivier Bourgeois, et al.. Stressed silicon nitride nanomechanical resonators at helium temperatures. Journal of Low Temperature Physics, 2013, 171 (5-6), pp.731-736. ⟨10.1007/s10909-012-0693-5⟩. ⟨hal-00861790⟩

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