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Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2012

Development of a microsystem based on a microfluidic network to tune and reconfigure RF circuits

Daouda Lamine Diedhiou
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  • PersonId : 920860
Eric Rius
Cédric Quendo
Benjamin Potelon
Jean-François Favennec

Résumé

This special issue presents devices and the results of a tunable microwave microsystem associating RF circuits and microfluidic components. A channel is buried inside the substrate of a microstrip waveguide. This channel is located beneath a resonant stub. With this configuration a microfluidic passive tunable filter can be fabricated. Dielectric fluids are used to disrupt the electric field in a microstrip structure and thus modify the effective permittivity of the substrate. In this work, a notch filter is realized with an open-ended quarter-wavelength stub placed on top of a hollow SU-8 structure. This structure offers two advantages: channels can easily be fabricated and a reduction of SU8 losses. The filter shows a good performance; the initial cut-off frequency of 25 GHz shifts more than 20% when deionized water is used in fluidic channels. And the shape of RF function is kept throughout the range.
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Dates et versions

hal-00855589 , version 1 (29-08-2013)

Identifiants

  • HAL Id : hal-00855589 , version 1

Citer

Stéphane Pinon, Daouda Lamine Diedhiou, Anne Marie Gué, Norbert Fabre, Gaëtan Prigent, et al.. Development of a microsystem based on a microfluidic network to tune and reconfigure RF circuits. Journal of Micromechanics and Microengineering, 2012, 22 (7), pp.article id. 074005. ⟨hal-00855589⟩
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