@inproceedings{lu:hal-00855438, TITLE = {{D{\'e}p{\^o}t et caract{\'e}risation de couches minces di{\'e}lectriques La-Ti-O-N}}, AUTHOR = {Lu, Yu and Benzegoutta, Dhafira and Nguyen, Viet Hung and Benzerga, Ratiba and Le Paven-Thivet, Claire and Le Gendre, Laurent and Sharaiha, Ala and Delaveaud, Christophe and Tessier, Franck and Chevir{\'e}, Fran{\c c}ois}, URL = {https://hal.science/hal-00855438}, BOOKTITLE = {{IBAF 2012 : Ion Beam Analysis Francophone - 4{\`e}me Rencontre ''Analyse par faisceaux d'ions rapides''}}, ADDRESS = {Saint-Paul-L{\`e}s-Durance, France}, YEAR = {2012}, MONTH = Dec, HAL_ID = {hal-00855438}, HAL_VERSION = {v1}, }