Injection of charge nanostructures into insulators
Résumé
The electron beam induced selfconsistent charge transport in insulators is described by means of an electron-hole flight-drift model FDM and an iterative computer simulation. Ballistic secondary electrons and holes, their attenuation and drift, as well as their recombination, trapping, and detrapping are included. Thermal and field-enhanced detrapping are described by the Poole-Frenkel effect. As a main result the time dependent secondary electron emission rate σ(t) and the spatial distributions of currents j(x,t), charges σ(x,t), field F(x,t), and potential V(x,t) are obtained. The spatial charge distributions with depth show a quadropolar plus-minus-plus-minus structure in nanometer dimensions.
Origine | Fichiers produits par l'(les) auteur(s) |
---|