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Study of free-standing electroded PZT thick films : from materials to microsystems

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hal-00832093 , version 1 (10-06-2013)

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  • HAL Id : hal-00832093 , version 1

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Hélène Debéda, Riadh Lakhmi, Valérie Budinger, Claude Lucat. Study of free-standing electroded PZT thick films : from materials to microsystems. Key Engineering Materials (3rd International Conference on Materials and Applications for Sensors and Transducers, IC-MAST), 2013, Prague, Czech Republic. pp.55-58. ⟨hal-00832093⟩
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