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Article Dans Une Revue Journal of European Optical Society. Rapid publications Année : 2013

Direct machining of curved trenches in silicon with femtosecond accelerating beams

Résumé

Control of the longitudinal profile of ablated structures during laser processing is a key technological requirement. We report here on the direct machining of trenches in silicon with circular profiles using femtosecond accelerating beams. We describe the ablation process based on an intensity threshold model, and show how the depth of the trenches can be predicted in the framework of a caustic description of the beam.
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Dates et versions

hal-00831508 , version 1 (07-06-2013)

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Amaury Mathis, Luc Froehly, Luca Furfaro, Maxime Jacquot, John Michael Dudley, et al.. Direct machining of curved trenches in silicon with femtosecond accelerating beams. Journal of European Optical Society. Rapid publications, 2013, 8, pp.13019. ⟨10.2971/jeos.2013.13019⟩. ⟨hal-00831508⟩
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