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Article Dans Une Revue Thin Solid Films Année : 2010

Synthesis of SrSnO3 thin films by pulsed laser deposition: Influence of substrate and deposition temperature

Résumé

SrSnO3 thin films were prepd. by pulsed laser deposition on amorphous silica and single crystal substrates of R-Al2O3, (100)LaAlO3, and (100)SrTiO3. High quality epitaxial (100) oriented films were obtained on LaAlO3 and SrTiO3 while a texture was revealed for films on Al2O3 deposited at the same deposition temp. of 700°. Amorphous films were obtained on SiO2 but a post annealing at 800° induced crystn. with a random orientation. The screening of deposition temp. showed epitaxial features on SrTiO3 from 650° while no crystn. was obsd. at 600°. The influence of substrate and deposition temp. was confirmed by SEM and AFM observations.

Domaines

Matériaux

Dates et versions

hal-00825591 , version 1 (24-05-2013)

Identifiants

Citer

M. C. F. Alves, S. Boursicot, Sophie Ollivier, Valérie Bouquet, Stéphanie Députier, et al.. Synthesis of SrSnO3 thin films by pulsed laser deposition: Influence of substrate and deposition temperature. Thin Solid Films, 2010, 519 (2), pp.614-618. ⟨10.1016/j.tsf.2010.07.092⟩. ⟨hal-00825591⟩
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