A converging route towards very high frequency, mechanically flexible, and performance stable integrated electronics - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Applied Physics Année : 2013

A converging route towards very high frequency, mechanically flexible, and performance stable integrated electronics

Résumé

The ability to realize flexible circuits integrating sensing, signal processing, and communicating capabilities is of central importance for the development of numerous nomadic applications requiring foldable, stretchable, and large area electronics. A key challenge is, however, to combine high electrical performance (i.e., millimeter wave, low noise electronics) with mechanical flexibility required for chip form adaptivity in addition to highly stable electrical performance upon deformation. Here, we describe a solution based on ultimate thinning and transfer onto a plastic foil of high frequency CMOS devices initially processed on conventional silicon-on-insulator wafers. We demonstrate a methodology relying on neutral plane engineering to provide high performance stability upon bending, by locating the active layer, i.e., the transistor channel, at the neutral fiber of the flexible system. Following this strategy, record frequency performance of flexible n-MOSFETs, featuring fT/fMAX of 120/145 GHz, is reported with relative variations limited to less than 5% even under aggressive bending on cylinders with curvature radii down to 12.5 mm

Domaines

Electronique
Fichier principal
Vignette du fichier
Etangs-Levallois_2013_1.4801803.pdf (5.15 Mo) Télécharger le fichier
Origine : Fichiers éditeurs autorisés sur une archive ouverte

Dates et versions

hal-00819466 , version 1 (25-05-2022)

Identifiants

Citer

A. Lecavelier Des Etangs-Levallois, Z. K. Chen, Marie Lesecq, Sylvie Lepilliet, Y. Tagro, et al.. A converging route towards very high frequency, mechanically flexible, and performance stable integrated electronics. Journal of Applied Physics, 2013, 113 (15), pp.153701. ⟨10.1063/1.4801803⟩. ⟨hal-00819466⟩
64 Consultations
34 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More