Communication Dans Un Congrès Année : 2012

Wide-Band Piezoresistive Microphone for Aero-Acoustic Applications

Résumé

A surface micro-machined microphone employing recrystallized metal-induced-laterally crystallized (RC-MILC) polycrystalline silicon (Poly-Si) piezoresistor is developed for aero-acoustic applications. A static sensitivity of ~0.4μV/V/Pa is measured using a nano-indentation technique and a useful bandwidth starting from ~100kHz with a resonance peak at ~400kHz has been obtained using shock waves generated using a the high-voltage electrical spark discharge.

Fichier non déposé

Dates et versions

hal-00815171 , version 1 (18-04-2013)

Identifiants

Citer

Z.J. Zhou, Libor Rufer, Man- Wong, E. Salze, P. Yuldashev, et al.. Wide-Band Piezoresistive Microphone for Aero-Acoustic Applications. The 11th Annual IEEE Conference on Sensors, Oct 2012, Taipei, Taiwan. pp.818-821, ⟨10.1109/ICSENS.2012.6411105⟩. ⟨hal-00815171⟩
188 Consultations
0 Téléchargements

Altmetric

Partager

  • More