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Conference Papers Year : 2008

Micro-cantilevers pressure sensors

V. Mortet
  • Function : Author
J. Potmesil
  • Function : Author
K. Haenen
  • Function : Author
M. d'Olieslaeger
  • Function : Author
Abdelkrim Talbi
M. Vanecek
  • Function : Author
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Dates and versions

hal-00811734 , version 1 (11-04-2013)

Identifiers

  • HAL Id : hal-00811734 , version 1

Cite

V. Mortet, A. Soltani, J. Potmesil, K. Haenen, M. d'Olieslaeger, et al.. Micro-cantilevers pressure sensors. International Workshop on Nanomechanical Cantilever Sensors 2008, NMC 2008, 2008, Mainz, Germany. ⟨hal-00811734⟩
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