Conference Papers Year : 2008

Micro-cantilevers pressure sensors

V. Mortet
  • Function : Author
A. Soltani
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
J. Potmesil
  • Function : Author
K. Haenen
  • Function : Author
M. d'Olieslaeger
  • Function : Author
Abdelkrim Talbi
M. Vanecek
  • Function : Author

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Engineering Sciences [physics]

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https://hal.science/hal-00811734

Submitted on : Thursday, April 11, 2013-9:21:33 AM

Last modification on : Wednesday, January 24, 2024-9:54:18 AM

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hal-00811734 , version 1 (11-04-2013)

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  • HAL Id : hal-00811734 , version 1

Cite

V. Mortet, A. Soltani, J. Potmesil, K. Haenen, M. d'Olieslaeger, et al.. Micro-cantilevers pressure sensors. International Workshop on Nanomechanical Cantilever Sensors 2008, NMC 2008, 2008, Mainz, Germany. ⟨hal-00811734⟩

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