5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection - Archive ouverte HAL
Communication Dans Un Congrès Année : 2013

5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection

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We report on a new concept of Atomic Force Microscope (AFM) oscillating probes using dog-bone resonator with thermal excitation and piezoresistive detection. The resonance frequency is 5.4 MHz and the quality factor is measured about 4,000 in air. AFM images are obtained over PMMA resist sample and the force resolution deduced from the measurement is about 320 pN/Hz0.5.
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hal-00809858 , version 1 (18-09-2024)

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Zhuang Xiong, Estelle Mairiaux, Benjamin Walter, Marc Faucher, Lionel Buchaillot, et al.. 5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection. 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, ⟨10.1109/MEMSYS.2013.6474311⟩. ⟨hal-00809858⟩
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