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Conference Papers Year : 2010

Unbalanced RF magnetron sputtering of thin hexagonal boron nitride films

B. Ben Moussa
  • Function : Author
J. d'Haen
  • Function : Author
C. Borschel
  • Function : Author
M. Saitner
  • Function : Author
V. Mortet
  • Function : Author
C. Ronning
  • Function : Author
M. d'Olieslaeger
  • Function : Author
H. Boyen
  • Function : Author
K. Haenen
  • Function : Author
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Dates and versions

hal-00808269 , version 1 (05-04-2013)

Identifiers

  • HAL Id : hal-00808269 , version 1

Cite

B. Ben Moussa, J. d'Haen, C. Borschel, M. Saitner, A. Soltani, et al.. Unbalanced RF magnetron sputtering of thin hexagonal boron nitride films. 4th International Conference on New Diamond and Nano Carbons, NDNC 2010, 2010, Suzhou, China. ⟨hal-00808269⟩
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