Conference Papers
Year : 2010
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https://hal.science/hal-00808269
Submitted on : Friday, April 5, 2013-10:57:02 AM
Last modification on : Friday, March 24, 2023-2:52:57 PM
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- HAL Id : hal-00808269 , version 1
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B. Ben Moussa, J. d'Haen, C. Borschel, M. Saitner, A. Soltani, et al.. Unbalanced RF magnetron sputtering of thin hexagonal boron nitride films. 4th International Conference on New Diamond and Nano Carbons, NDNC 2010, 2010, Suzhou, China. ⟨hal-00808269⟩
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